Substrate processing apparatus and substrate conveying apparatus for use in the same
US9624046B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2014 |
| Grant date | Apr 18, 2017 |
| Priority date | — |
| Expiry date | Sep 10, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/138
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A substrate processing apparatus includes a substrate processing section that processes a plurality of substrates assuming a vertical posture in a batch manner; a first traversing mechanism that laterally moves a first traverse holding portion along a first traversing path between a substrate transfer position and a substrate delivery position; a second traversing mechanism that laterally moves a second traverse holding portion along a second traversing path disposed below the first traversing path between the substrate transfer position and the substrate delivery position; an elevation mechanism that raises and lowers an elevation holding portion in the substrate transfer position; and a main transfer mechanism that conveys a plurality of substrates assuming a vertical posture in a batch manner between the substrate delivery position and the substrate processing section, the first and second traverse holding portions, and the elevation holding portion each holds a plurality of substrates assuming a vertical posture in a batch manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.