Capacitive acceleration sensor with a bending elastic beam and preparation method thereof

US9625487B2 · kind B2 · utility

Assignee

• SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY CHINESE ACADEMY OF SCIENCES · CN

Inventors

• Lufeng Che · Shanghai, CN
• Xiaofeng Zhou · Shanghai, CN
• Yuelin Wang · Shanghai, CN

Key dates

• Filing date: Dec 4, 2012
• Grant date: Apr 18, 2017
• Expiry date: Jul 7, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0882
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The present invention provides a capacitive acceleration sensor with a bending elastic beam and a preparation method. The sensor at least includes a first electrode structural layer, a middle structural layer and a second electrode structural layer; wherein the first electrode structural layer and the second electrode structural layer are provided with an electrode lead via-hole, respectively; the middle structural layer includes: a frame formed on a SOI silicon substrate with a double device layers, a seismic mass whose double sides are symmetrical and a bending elastic beam with one end connected to the frame and the other end connected to the seismic mass, wherein anti-overloading bumps and damping grooves are symmetrically provided on two sides of the seismic mass, and the bending elastic beams at different planes are staggered distributed and are not overlapped with each other in space. Since the bending times, the total length and the total width of the bending elastic beam can be prepared as needed, capacitive acceleration sensors with different sensitivities can be manufactured according to the present invention, and the manufacturing has high flexibility.