Computation efficiency by diffraction order truncation
US9625937B2 · kind B2 · utility
1Cited by
7References
18Claims
0Family size
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Key dates
| Filing date | Aug 18, 2008 |
| Grant date | Apr 18, 2017 |
| Priority date | — |
| Expiry date | Dec 5, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06E1/00
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A method for improving computation efficiency for diffraction signals in optical metrology is described. The method includes simulating a set of diffraction orders for a three-dimensional structure. The diffraction orders within the set of diffraction orders are then prioritized. The set of diffraction orders is truncated to provide a truncated set of diffraction orders based on the prioritizing. Finally, a simulated spectrum is provided based on the truncated set of diffraction orders.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.