Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium
US9631963B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2015 |
| Grant date | Apr 25, 2017 |
| Priority date | — |
| Expiry date | Jun 29, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/1013
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus is configured to perform a solution process by supplying a processing solution from a processing solution supply source to the substrate held on a substrate holder via a flow path member and a nozzle at a flow rate equal to or less than 1 mL/sec. The apparatus includes a solution transfer unit configured to transfer the processing solution to the nozzle, and connected to the flow path member, and an ultrasonic flowmeter connected to the flow path member at an outlet side from the solution transfer unit. In this embodiment, a lower limit of a flow rate range which is measured by the ultrasonic flowmeter is equal to or less than 1 mL/sec.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.