Self-heated MEMs based capacitance diaphragm gauge
US9631993B2 · kind B2 · utility
0Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2011 |
| Grant date | Apr 25, 2017 |
| Priority date | — |
| Expiry date | Oct 10, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The disclosed embodiments include a capacitance diaphragm gauge that includes a self-heated micro-electro-mechanical-system sensor for measuring pressure. The self-heated micro-electro-mechanical-system has at least one integrated heater component and at least one membrane on the self-heated micro-electro-mechanical-system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.