Fullerenes

US9632409B2 · kind B2 · utility

Assignee

• IRRESISTIBLE MATERIALS LTD · GB

Inventors

• Alex Phillip Graham Robinson · Birmingham, GB
• Richard Edward Palmer · Stourbridge, GB
• Andreas Frommhold · Köthen, DE
• Dongxu Yang · Harborne, GB

Key dates

• Filing date: May 21, 2014
• Grant date: Apr 25, 2017
• Expiry date: May 21, 2034

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C07C2604/00
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The present disclosure relates to novel fullerene derivatives, positive and negative photoresist compositions prepared therefrom and methods of using them. The derivatives, their photoresist compositions and the methods are ideal for high speed, fine pattern processing using, for example, ultraviolet radiation, extreme ultraviolet radiation, beyond extreme ultraviolet radiation, X-rays, electron beam and other charged particle rays.