Evaluation method of suitable silica powder in manufacturing vitreous silica crucible for pulling of silicon single crystal
US9637405B2 · kind B2 · utility
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Key dates
| Filing date | Jun 30, 2013 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Jun 30, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P40/57
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An evaluation method of suitable silica powder for forming a bubble-free layer of a vitreous silica crucible for pulling of a silicon single crystal, includes: a process of measuring a porosity between silica particles in the silica powder, a process of melting the silica powder, a process of measuring a bubble content rate of a vitreous silica block obtained by cooling to harden the melted silica powder, and a process of determining whether the silica powder is suitable from the porosity of the silica powder and the bubble content rate of the vitreous silica block.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.