Method for determining a three-dimensional stress field of an object, an integrated structure in particular, and corresponding system
US9638589B2 · kind B2 · utility
3Cited by
8References
33Claims
0Family size
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Key dates
| Filing date | Jun 23, 2014 |
| Grant date | May 2, 2017 |
| Priority date | — |
| Expiry date | Feb 11, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and corresponding system are provided for determining a three-dimensional stress field of an object having a flat surface. At least four flat resistors are placed on the flat surface of the object, with at least one of the resistors having a geometry different from that of the others. A variation of resistance of the resistors is measured. The three-dimensional stress field is determined from a system of equations involving the stress field, values of variations of the measured resistive values and sensitivity parameters of the resistors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.