Patent · US Active

Differential pressure sensor assembly

US9638597B2 · kind B2 · utility

4Cited by
7References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 24, 2014
Grant dateMay 2, 2017
Priority date
Expiry dateMay 30, 2035

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/1815
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A differential pressure sensor assembly includes a transducer having a first sensing surface and a second sensing surface. The second sensing surface is contained in a cavity. An Integrated Circuit (IC) is hermetically coupled to the transducer. The IC has a first aperture aligned to the cavity. A lead frame is coupled to the IC. The lead frame has a second aperture aligned to the first aperture of the IC. A package encapsulates the transducer, the IC and the lead frame. The package has a third aperture exposed to the first sensing surface. The package includes a molding compound providing a hermetic seal between the third aperture of the package and the first aperture of the IC. The molding compound is separated from the transducer by an encroachment distance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.