Patent · US Active

Positioner of probe card and probe head of probe card

US9638716B2 · kind B2 · utility

0Cited by
1References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 3, 2014
Grant dateMay 2, 2017
Priority date
Expiry dateDec 8, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/07357
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A positioner and a probe head of a probe card are provided. The positioner has a main opening, a first sub-opening, a second sub-opening, a third sub-opening, a fourth sub-opening, a first positioning portion, a second positioning portion, a first elastic portion and a second elastic portion. The first sub-opening, the second sub-opening, the third sub-opening, and the fourth sub-opening are sequentially arranged at the periphery of the main opening and are communicated to the main opening. A stiffness of the first positioning portion and a stiffness of the second positioning portion are higher than a stiffness of the first elastic portion and a stiffness of the second elastic portion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.