Single-position hall effect measurements

US9644939B2 · kind B2 · utility

Assignee

• CAPRES A/S · DK

Inventors

• Fei Wang · Beijing, CN
• Dirch Hjorth Petersen · Copenhagen, DK
• Ole Hansen · Avenue Madeleine, DK

Key dates

• Filing date: Dec 21, 2011
• Grant date: May 9, 2017
• Expiry date: Jul 14, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L22/34
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for determining an electrical property of a test sample having a conductive surface portion with an electrical boundary includes (a) determining a first distance between the single position and the boundary by (1) contacting the test sample with a first four-contact configuration of a multi-contact probe at the single position; (2) applying a magnetic field at the single position; (3) measuring first and second resistances from which to calculate a first resistance difference; (4) measuring third and fourth resistances from which to calculate a second resistance difference; (5) defining a first relation including parameters representing the first and second resistance differences and the first distance; (6) determining the first distance by using the first and second resistance differences in the first relation; (b) repeating steps (1)-(6) with a second four-contact configuration to determine a second distance between the single position and the boundary; (c) defining a second relation including the electrical property and a fourth parameter representing the second distance; and (d) employing the second distance as the fourth parameter in the second relation for determinin…