Patent · US Active

Head limiting movement range of laser spot and atomic force microscope having the same

US9645168B2 · kind B2 · utility

0Cited by
4References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 23, 2015
Grant dateMay 9, 2017
Priority date
Expiry dateDec 23, 2035

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB82Y35/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Provided are a head having improved usability by limiting a movement range of a laser spot and an atomic force microscope having the same.A head according to an exemplary embodiment of the present disclosure is a head measuring bending of a cantilever by using a laser beam reflected on the surface of the cantilever in order to acquire information on a sample surface by using a tip of the cantilever. The head includes: a spot moving means configured to move a laser spot so as to position the laser spot on the surface of the cantilever; and a movement limiting means configured to limit a movement range of the laser spot moved by the spot moving means in a predetermined range.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.