Head limiting movement range of laser spot and atomic force microscope having the same
US9645168B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2015 |
| Grant date | May 9, 2017 |
| Priority date | — |
| Expiry date | Dec 23, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are a head having improved usability by limiting a movement range of a laser spot and an atomic force microscope having the same.A head according to an exemplary embodiment of the present disclosure is a head measuring bending of a cantilever by using a laser beam reflected on the surface of the cantilever in order to acquire information on a sample surface by using a tip of the cantilever. The head includes: a spot moving means configured to move a laser spot so as to position the laser spot on the surface of the cantilever; and a movement limiting means configured to limit a movement range of the laser spot moved by the spot moving means in a predetermined range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.