Collector

US9645503B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Ingo Saenger · Heidenheim, DE
• Joerg Zimmermann · Vancouver, CA
• Daniel Kraehmer · Aalen, DE
• Johannes Ruoff · Aalen, DE
• Martin Meier · Heidenheim, DE
• Frank Schlesener · Oberkochen, DE
• Christoph Hennerkes · Wertingen, DE
• Wolfgang Singer · Aalen, DE

Key dates

• Filing date: Mar 14, 2014
• Grant date: May 9, 2017
• Expiry date: Mar 3, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G21K2201/067
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A collector for a projection exposure apparatus for microlithography comprises a plurality of reflective sections which are embodied and arranged in such a way that they can be impinged upon during the focusing of radiation from a first focus into a second focus with angles of impingement in a predefined angular spectrum.