Inspection apparatus
US9646372B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 16, 2013 |
| Grant date | May 9, 2017 |
| Priority date | — |
| Expiry date | Sep 16, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for inspecting flat objects, in particular wafers, containing an object holder; a camera arrangement having a camera for recording an image of at least one part of the object; and a drive arrangement for producing a relative movement between the camera arrangement and the object from a first recording position to at least one further recording position; is characterized in that the camera arrangement has at least one further camera; the object areas imaged in different cameras are at least partially different, wherein all cameras together simultaneously record only part of the total inspection area of the object; and each object point of the entire inspection area can be imaged at least once in one of the cameras as a result of the relative movement between the camera arrangement and the object, as produced with the drive arrangement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.