Patent · US Active

Visible laser probing for circuit debug and defect analysis

US9651610B2 · kind B2 · utility

6Cited by
10References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 29, 2013
Grant dateMay 16, 2017
Priority date—
Expiry dateApr 11, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/311
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Visible laser probing is described. In one example a probe device has a laser configured to provide a laser beam at a visible wavelength, an objective lens positioned in front of the laser to focus the laser beam on an active region of an integrated circuit through a back side of an integrated circuit die, and a detector positioned to receive a reflected laser beam reflected from the active region through a back side of the die, through the objective lens. The detector is configured to detect an amplitude modulation of the reflected laser beam wherein the amplitude modulation is attributable to the electric field at the active region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.