Method and system for reducing charging artifacts in scanning electron microscopy images
US9653257B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2016 |
| Grant date | May 16, 2017 |
| Priority date | — |
| Expiry date | Mar 1, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/226
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscopy system for mitigating charging artifacts includes a scanning electron microscopy sub-system for acquiring multiple images from a sample. The images include one or more sets of complementary images. The one or more sets of complementary images include a first image acquired along a first scan direction and a second image acquired along a second scan direction opposite to the first scan direction. The system includes a controller communicatively coupled to the scanning electron microscopy sub-system. The controller is configured to receive images of the sample from the scanning electron microscopy sub-system. The controller is further configured to generate a composite image by combining the one or more sets of complementary images.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.