Temperature controlled chamber liner
US9653267B2 · kind B2 · utility
298Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2012 |
| Grant date | May 16, 2017 |
| Priority date | — |
| Expiry date | Mar 22, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24479
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A liner for a semiconductor processing chamber and a semiconductor processing chamber are provided. In one embodiment, a liner for a semiconductor processing chamber includes a body having an outwardly extending flange. A plurality of protrusions extend from a bottom surface of the flange. The protrusions have a bottom surface defining a contact area that is asymmetrically distributed around the bottom surface of the flange.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.