System and method of characterizing micro-fabrication processes
US9658169B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2014 |
| Grant date | May 23, 2017 |
| Priority date | — |
| Expiry date | Apr 28, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/88
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for assessing a structure and the tools and processes used to form the structure is described. 2D images of the structure are captured and processed to obtain 3D information concerning the structure. Both 2D and 3D information is then used to identify and analyze selected characteristics of the structure. This analysis allows for a quality assessment of the structure. The selected characteristics are correlated with information relating to the operation of the tool that carried out the process that at least in part created the structure. The correlation of tool/process information to structure characteristics allows for the generation of feedback that may be used to modify the tool or processed used to form the structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.