Patent · US Active

System and method for a MEMS transducer

US9658179B2 · kind B2 · utility

4Cited by

11References

22Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Vijaye Kumar Rajaraman · Villach, AT
Yonsuang Arnanthigo · Villach, AT
Alfons Dehe · Reutlingen, DE
Stefan Kolb · Unterschleißheim, DE

Key dates

Filing date	Jun 24, 2015
Grant date	May 23, 2017
Priority date	—
Expiry date	Jun 24, 2035

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.