Patent · US Active

Optical element

US9658542B2 · kind B2 · utility

0Cited by

0References

25Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Willi Heintel · Aalen, DE
Steffen Fritzsche · Tholey, DE

Key dates

Filing date	Oct 7, 2014
Grant date	May 23, 2017
Priority date	—
Expiry date	Apr 24, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The disclosure relates to an optical assembly for a projection exposure apparatus for semiconductor lithography. The optical assembly includes at least one optical element and a mounting body for mechanically fixing the element in a supporting structure. The optical assembly also includes at least one cooling body for dissipating heat from the element. The mounting body and the cooling body are separate from one another. The optical element is connected to the cooling body via at least one heat-conducting element. The disclosure also relates to a projection exposure apparatus including an optical assembly according to the disclosure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.