Patent · US Active

Suspensions for protecting semiconductor materials and methods of producing semiconductor bodies

US9663699B2 · kind B2 · utility

0Cited by
1References
7Claims
0Family size

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Inventors

Key dates

Filing dateFeb 25, 2016
Grant dateMay 30, 2017
Priority date
Expiry dateFeb 25, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10H20/01
  • WIPO fieldBasic materials chemistry
  • WIPO sectorChemistry

Abstract

A suspension for protecting a semiconductor material, comprising a carrier medium, trimethylolpropane as a plasticizer, benzotriazole derivate as an absorber dye, and inorganic particles selected from the group consisting of aluminum nitride, silicon nitride and boron nitride, wherein the thermal conductivity of the suspension is about 1 W/mk to about 2 W/mk.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.