Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus
US9663862B2 · kind B2 · utility
1Cited by
25References
3Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 4, 2015 |
| Grant date | May 30, 2017 |
| Priority date | — |
| Expiry date | Nov 4, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/3065
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of smoothing a solid surface with a gas cluster ion beam includes irradiating the solid surface with the gas cluster ion beam. The irradiating includes, when scratches which can be likened to a line-and-space pattern structure with widths and heights on the order of a submicrometer to micrometer are present on the solid surface, a process of emitting the gas cluster ion beam so as to expose substances, which remain on side-walls of the scratches due to lateral transferal caused by collisions with gas clusters, to other gas clusters, and the gas cluster ion beam diverges non-concentrically and/or non-uniformly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.