Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the same
US9666454B2 · kind B2 · utility
5Cited by
8References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 2014 |
| Grant date | May 30, 2017 |
| Priority date | — |
| Expiry date | Apr 15, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49826
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer storage apparatus includes a wafer stacking portion that encloses an internal space with an open front side for receiving a plurality of wafers; a rear cover portion disposed on the back side of the wafer stacking portion; and a gas charging portion that includes a plurality of gas supply blocks disposed on the inner side of the rear cover portion, a plurality of gas supply pipes connected to the gas supply blocks via through holes in the rear cover portion, and a gas supply unit connected to the gas supply pipes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.