Young-Suk Sim
7Patents
4h-index
10Co-inventors
50Inventor score
Filing activity: Jun 19, 2003 → Dec 22, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7914693B2 | Stamp for micro/nano imprint lithography using diamond-like carbon and method of fabricating the same | Performing Operations; Transporting | 61 | Active |
| US6943117B2 | UV nanoimprint lithography process using elementwise embossed stamp and selectively additive pressurization | Emerging Cross-Sectional Technologies | 47 | Expired |
| US7442316B2 | Microcontact printing method using imprinted nanostructure and nanostructure thereof | Emerging Cross-Sectional Technologies | 5 | Active |
| US9666454B2 | Wafer storage apparatus having gas charging portions and semiconductor manufacturing apparatus using the same | Emerging Cross-Sectional Technologies | 5 | Active |
| US7645133B2 | UV nanoimprint lithography process and apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US8168107B2 | Method of forming a pattern using nano imprinting and method of manufacturing a mold to form such a pattern | Performing Operations; Transporting | 0 | Active |
| US8025830B2 | UV nanoimprint lithography process and apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.