Measurement method for height profiles of surfaces using a differential interference contrast image

US9671602B2 · kind B2 · utility

Assignee

• HSEB Dresden GmbH · DE

Inventors

• Christine Schmidt · Berlin, DE
• Bernd Srocka · Berlin, DE
• Ralf Langhans · Dresden, DE

Key dates

• Filing date: Aug 9, 2012
• Grant date: Jun 6, 2017
• Expiry date: Dec 9, 2033

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B11/0608
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for optically measuring height profiles of surfaces, in which an image of the height profile is recorded using an optical recording system, is characterized in that the image is a differential interference contrast image and height gradients within the height profile are represented by intensity gradients, which are quantitatively or qualitatively evaluatable. The surfaces can have structures having a defined profile, in which intensity gradients in the differential interference contrast image, which assume, within a specified tolerance and within a specified range, a value which deviates from a predetermined value or assume a selected value from within a specified tolerance and within a specified range, indicate a defect.