Substrate freeze dry apparatus and method
US9673037B2 · kind B2 · utility
6Cited by
8References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2011 |
| Grant date | Jun 6, 2017 |
| Priority date | — |
| Expiry date | Sep 9, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6831
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for freeze drying a substrate is provided. A chamber for receiving a substrate is provided. An electrostatic chuck (ESC) for supporting and electrostatically clamping the substrate is within the chamber. A temperature controller controls the temperature of the electrostatic chuck. A condenser is connected to the chamber. A vacuum pump is in fluid connection with the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.