Method of treating a cleanroom enclosure
US9682345B2 · kind B2 · utility
27Cited by
35References
23Claims
0Family size
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Inventors
Key dates
| Filing date | Jul 7, 2015 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Jul 7, 2035 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2259/4508
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
This invention is in the field of systems and methods for controlling contamination in high purity environments. This invention relates generally to particulate filtering and treatment of molecular contamination and process gases in enclosures, such as cleanrooms, contamination controlled manufacturing environments, mini-environments, isolators, glove boxes and restricted air barrier systems (RABS). The invention is capable of chemically transforming molecular contamination and process gases into less reactive or inert reaction products while at the same time decreasing the level of biological and nonbiological particulates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.