Scanning microscope
US9684159B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2009 |
| Grant date | Jun 20, 2017 |
| Priority date | — |
| Expiry date | Feb 27, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D2205/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning microscope includes a stage for holding a sample, a scan mechanism, a probing system for probing a region of the sample, a position sensor, and a controller. The scan mechanism is configured to translate the stage between at least two axial positions. The probing system includes an optical element and a photosensor having a readout region, where the readout region extends in a direction which is transverse to an ideal orientation of the stage. The position sensor is configured to measure a transverse position of the stage and/or of an orientation of the stage. The controller is configured to adapt the probing system as a function of the measured transverse position and/or the measured orientation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.