Micromechanical component and method for producing a micromechanical component

US9688527B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Jens Frey · Echterdingen, DE
• Jochen Reinmuth · Reutlingen, DE

Key dates

• Filing date: Aug 25, 2014
• Grant date: Jun 27, 2017
• Expiry date: Jul 14, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2203/04
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical component is provided having a substrate having a main plane of extension, a first electrode extending mainly along a first plane in planar fashion, a second electrode extending mainly along a second plane in planar fashion, and a third electrode extending mainly along a third plane in planar fashion, the first, second, and third plane being oriented essentially parallel to the main plane of extension and being situated one over the other at a distance from one another along a normal direction that is essentially perpendicular to the main plane of extension, the micromechanical component having a deflectable mass element, the mass element being capable of being deflected both essentially parallel and also essentially perpendicular to the main plane of extension, the second electrode being connected immovably to the mass element, the second electrode having, in a rest position, a first region of overlap with the first electrode along a projection direction essentially parallel to the normal direction, and having a second region of overlap with the third electrode along a projection direction parallel to the projection direction, the mass element extending in planar…