Patent · US Active

Micro-electro-mechanical device having two buried cavities and manufacturing process thereof

US9688531B2 · kind B2 · utility

11Cited by

4References

23Claims

0Family size

Assignee

STMicroelectronics SA

Inventors

Lorenzo Baldo · Bareggio, IT
Enri Duqi · Milano, IT
Flavio Francesco Villa · Milano, IT

Key dates

Filing date	Jun 23, 2016
Grant date	Jun 27, 2017
Priority date	—
Expiry date	Jun 23, 2036

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0785
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micro-electro-mechanical device formed in a monolithic body of semiconductor material accommodating a first buried cavity; a sensitive region above the first buried cavity; and a second buried cavity extending in the sensitive region. A decoupling trench extends from a first face of the monolithic body as far as the first buried cavity and laterally surrounds the second buried cavity. The decoupling trench separates the sensitive region from a peripheral portion of the monolithic body.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.