Selfcalibration of capacitive pressure sensors with electrostatic forces
US9689770B2 · kind B2 · utility
13Cited by
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22Claims
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Key dates
| Filing date | Jul 17, 2014 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Sep 4, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor calibration system comprises one or more pressures sensors for calibrating sensor parameters based on a membrane deflection or a membrane displacement from an electrostatic force. A measuring component measures capacitance values corresponding to applied voltages at the electrodes of the one or more pressure sensors. Sensor parameters are derived from capacitance measurements and a pressure measurement, which are utilized by a calibration component for calibration and recalibration of the one or more pressure sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.