Pellicles and methods of manufacturing the same
US9690190B2 · kind B2 · utility
2Cited by
2References
8Claims
0Family size
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Key dates
| Filing date | Dec 15, 2015 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | Dec 15, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23F1/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of manufacturing a pellicle includes forming a membrane on a first surface of a substrate from a chemical reaction in which the substrate serves as a catalyst, forming a protective pattern on a second surface of the substrate, immersing the substrate in an etchant solution, such that a portion of the substrate exposed through the protective pattern is removed to form a frame, and replacing the etchant solution with a solvent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.