Surface defect repair by irradiation
US9690191B2 · kind B2 · utility
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22Claims
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Key dates
| Filing date | Feb 17, 2014 |
| Grant date | Jun 27, 2017 |
| Priority date | — |
| Expiry date | May 8, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/24
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for repairing a defect on a substrate surface includes placing on the defect a nanoparticle that includes a conductive material. A region of the substrate surface in which the nanoparticle is placed is irradiated, the region being larger than the nanoparticle. An energy density of the irradiation is below a modification threshold for the substrate surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.