Patent · US Active

Surface defect repair by irradiation

US9690191B2 · kind B2 · utility

0Cited by
0References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 17, 2014
Grant dateJun 27, 2017
Priority date
Expiry dateMay 8, 2034

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F1/24
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A method for repairing a defect on a substrate surface includes placing on the defect a nanoparticle that includes a conductive material. A region of the substrate surface in which the nanoparticle is placed is irradiated, the region being larger than the nanoparticle. An energy density of the irradiation is below a modification threshold for the substrate surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.