Sergey Oshemkov
12Patents
5h-index
22Co-inventors
66Inventor score
Filing activity: Aug 7, 2000 → Aug 8, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6873444B1 | Volume holograms in transparent materials | Emerging Cross-Sectional Technologies | 13 | Expired |
| US7459242B2 | Method and system for repairing defected photomasks | Physics | 9 | Expired |
| US7736819B2 | Method for correcting critical dimension variations in photomasks | Physics | 8 | Active |
| US6566626B2 | Method and apparatus for generating color images in a transparent medium | Chemistry; Metallurgy | 8 | Expired |
| US6884961B1 | Intravolume diffractive optical elements | Physics | 6 | Expired |
| US10095101B2 | Critical dimension variation correction in extreme ultraviolet lithography | Physics | 2 | Active |
| US10670955B2 | Critical dimension variation correction in extreme ultraviolet lithography | Physics | 2 | Active |
| US8101921B2 | Apparatus and method for inducing controllable jets in liquids | Emerging Cross-Sectional Technologies | 1 | Active |
| US9034539B2 | Controllable transmission and phase compensation of transparent material | Chemistry; Metallurgy | 1 | Active |
| US11774870B2 | Method for removing a particle from a mask system | Physics | 0 | Active |
| US8735030B2 | Method and apparatus for modifying a substrate surface of a photolithographic mask | Physics | 0 | Active |
| US9690191B2 | Surface defect repair by irradiation | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.