Workpiece handling system and methods of workpiece handling
US9694989B2 · kind B2 · utility
1Cited by
12References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2012 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Jul 17, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2203/041
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
One embodiment of this workpiece handling system has conveyor belts and a load lock. A first swap robot holds and transports workpieces between a build station and the load lock. A gantry robot transports the workpieces between each of the conveyor belts and the first swap robot. In one instance, processed workpieces are transported from the first swap robot to a first conveyor belt and unprocessed workpieces are transported from a second conveyor belt to the first swap robot using the gantry robot. A second swap robot also may be used with the first swap robot to load and unload workpieces from the load lock.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.