Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates
US9694990B2 · kind B2 · utility
5Cited by
11References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2013 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Apr 19, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67709
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A transport and handing-over arrangement for disc shaped substrates, comprising a carrier (3) and a take-over arrangement (15). Both are moveable relative to each other. A relatively heavy substrate carrier (7) of magnetizable material is taken-over from the take-over arrangement (15) by distance control of a permanent magnet (17) at the take-over arrangement (15) or is returned therefrom to a carrier (3). The controlled drive of the permanent magnets (17) in the take-over arrangement (15) is performed by means of pneumatic piston/cylinder arrangements (19).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.