Evacuating a chamber
US9695814B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2012 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | May 18, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86139
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method and apparatus for reducing undesirable noise generated by a vacuum pumping system. The vacuum system operates to reduce the pressure in a chamber to a first pressure value. The system then detects that the pressure at the vacuum pump system's inlet is about to change to a second higher pressure and, in response, the speed of a booster pump in the vacuum pump system is reduced below the rated speed for the pump. When the pressure at the vacuum pump's inlet is above the second pressure, the speed of the booster pump is increased to the rated speed. Thus, the booster pump is slowed down prior the pump system becoming exposed to a rapid increase in inlet pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.