Fluid delivery system and method
US9695985B2 · kind B2 · utility
4Cited by
12References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2013 |
| Grant date | Jul 4, 2017 |
| Priority date | — |
| Expiry date | Mar 15, 2033 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C7/00
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.