Adapter tool and wafer handling system

US9698038B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Michael Larisch · Regensburg, DE
• Ulrich Beck · Mintraching, DE
• Michael Walser · Schaan, LI

Key dates

• Filing date: Aug 28, 2014
• Grant date: Jul 4, 2017
• Expiry date: Dec 3, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/6835
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

An adapter tool that is configured to be attached to a loadport of a wafer handling system includes a support member, and first and second guiding elements supported by the support member. The first and second guiding elements are arranged for placing a first wafer magazine and a second wafer magazine, respectively. The adapter tool further includes a housing supported by the support member that is configured to house the first and the second wafer magazines, respectively, and first and second openings in the housing, respectively. The first and second openings are aligned with the first and second guiding elements.