Patent · US Active

Method for slicing workpiece and wire saw

US9707635B2 · kind B2 · utility

0Cited by
6References
2Claims
0Family size

Assignee

Inventor

Key dates

Filing dateAug 29, 2012
Grant dateJul 18, 2017
Priority date
Expiry dateMay 31, 2033

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T83/9292
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

A method for slicing a workpiece into wafers by imparting axial reciprocating motion to a wire wound around a plurality of grooved rollers, and moving the workpiece relatively downwardly to press the workpiece against the reciprocating wire and feed the workpiece with the workpiece cut into while supplying a slurry to the wire, the method including the steps of: configuring each of the grooved rollers such that a distance from a bottom of grooves of the grooved roller to a rotating shaft of the grooved roller decreases gradually from a wire-supply side toward a wire-collection side; slicing the workpiece in such a manner that the workpiece is pressed against the wire on the wire-supply side before the workpiece is pressed against the wire on the wire-collection side.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.