Reactive-species supply device and surface treatment apparatus
US9713241B2 · kind B2 · utility
1Cited by
5References
10Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 30, 2011 |
| Grant date | Jul 18, 2017 |
| Priority date | — |
| Expiry date | Jun 25, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2245/40
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A reactive-species supply device is configured to supply a treatment gas to an electric discharge space, for thereby supplying at least a reactive species formed in a plasma, to an object. The reactive-species supply device includes (a) at least one pair of electrodes configured to form the electric discharge space and (b) an electrode protection device configured to protect the electrodes from the treatment gas. Also disclosed is a surface treatment apparatus that includes the reactive-species supply device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.