Carrier and a method for processing a carrier
US9716015B2 · kind B2 · utility
1Cited by
11References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 22, 2015 |
| Grant date | Jul 25, 2017 |
| Priority date | — |
| Expiry date | Dec 22, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/13
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
According to various embodiments, a carrier may include: a hollow chamber spaced apart from a surface of the carrier; and at least one support structure within the hollow chamber connecting a first region of the carrier disposed over the hollow chamber with a second region of the carrier disposed below the hollow chamber, wherein at least a part of a surface of the at least one support structure is spaced apart from an inner surface of the hollow chamber, and wherein the at least one support structure includes an electrically insulating material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.