Patent · US Active

Compressive sensing with illumination patterning

US9719940B2 · kind B2 · utility

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Key dates

Filing dateOct 5, 2015
Grant dateAug 1, 2017
Priority date—
Expiry dateOct 5, 2035

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2201/06
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Methods and systems are provided, which pattern an illumination of a metrology target with respect to spectral ranges and/or polarizations, illuminate a metrology target by the patterned illumination, and measure radiation scattered from the target by directing, at a pupil plane, selected pupil plane pixels from a to respective single detector(s) by applying a collection pattern to the pupil plane pixels. Single detector measurements (compressive sensing) has increased light sensitivity which is utilized to pattern the illumination and further enhance the information content of detected scattered radiation with respect to predefined metrology parameters.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.