Electrostatic chuck apparatus
US9721822B2 · kind B2 · utility
1Cited by
5References
20Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 6, 2015 |
| Grant date | Aug 1, 2017 |
| Priority date | — |
| Expiry date | Oct 12, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/338
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is an electrostatic chuck apparatus which is configured of: an electrostatic chuck section; an annular focus ring section provided to surround the electrostatic chuck section; and a cooling base section which cools the electrostatic chuck section and the focus ring section. The focus ring section is provided with an annular focus ring, an annular heat conducting sheet, an annular ceramic ring, a nonmagnetic heater, and an electrode section that supplies power to the heater.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.