Vertical membranes for pressure sensing applications
US9733139B2 · kind B2 · utility
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4References
10Claims
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Key dates
| Filing date | May 2, 2014 |
| Grant date | Aug 15, 2017 |
| Priority date | — |
| Expiry date | Mar 27, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0618
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Pressure sensors having vertical diaphragms or membranes. A vertical diaphragm may be located in a first silicon wafer between a first and second cavity, where the first and second cavities are covered by a second silicon wafer. One or more active or passive devices or components may be located on a top of the vertical diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.