Patent · US Active

Vertical hall effect sensor

US9735345B2 · kind B2 · utility

1Cited by
50References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 4, 2016
Grant dateAug 15, 2017
Priority date
Expiry dateMar 4, 2036

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N59/00
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

In one aspect, a vertical Hall effect sensor includes a semiconductor wafer having a first conductivity type and a plurality of semiconductive electrodes disposed on the semiconductor wafer. The plurality of semiconductive electrodes have the first conductivity type and include a source electrode, a first sensing electrode and a second sensing electrode, arranged such that the source electrode is between the first sensing electrode and the sensing electrode and a first drain electrode and a second drain electrode, arranged such that the first sensing electrode, second sensing electrode, and source electrode are between the first drain electrode and the second drain electrode. The vertical Hall effect sensor also includes a plurality of semiconductor fingers disposed on the semiconductor wafer and interdigitated with the plurality of semiconductive electrodes, the semiconductor fingers having a second conductivity type.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.