Patent · US Active

Method and device for determining a distance between two optical boundary surfaces which are spaced apart from each other along a first direction

US9741122B2 · kind B2 · utility

0Cited by

7References

16Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Reiner Mitzkus · Oettingen, DE
Matthias Pospiech · Hannover, DE
Anke Vogelgsang · Oettingen, DE

Key dates

Filing date	Aug 14, 2015
Grant date	Aug 22, 2017
Priority date	—
Expiry date	Aug 14, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/10148
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method is provided for determining the distance between two optical boundary surfaces spaced apart from each other in a first direction. A first image is ascertained wherein the plane into which the pattern acquired coincides with a first of two optical boundary surfaces or has the smallest distance to the first optical boundary surface in a first direction. A position of the first image in the first direction is determined. A second image is ascertained wherein the plane into which the pattern acquired coincides with a second of two optical boundary surfaces or has the smallest distance to the second optical boundary surface in the first direction. The position of the second image in the first direction is determined. The distance is calculated by means of determined positions of the first and second image.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.