Method and apparatus for determining cleanliness of a sample
US9746409B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2013 |
| Grant date | Aug 29, 2017 |
| Priority date | — |
| Expiry date | Sep 11, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0046
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and apparatus for determining cleanliness of a sample is provided. The method includes taking a first reading of particles count of a sample placed into a chamber. The method further includes directing a stream of air over the sample, and taking a second reading of particles count of the sample. The method further includes calculating a difference between the first reading and the second reading, and determining a cleanliness of the sample based upon the difference. The method further includes option of taking an additional reading while a stream of ionized air is directed towards the sample. The method further includes trapping the impurities particles released from the sample by applying a vacuum through the filter, and analyzing the trapped particles to determine nature and chemical composition of the impurities particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.