Method for forming a self-aligned mach-zehnder interferometer
US9746744B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 31, 2017 |
| Grant date | Aug 29, 2017 |
| Priority date | — |
| Expiry date | May 31, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/212
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of forming a waveguide for a self-aligned Mach-Zehnder-Interferometer. The method includes forming a waveguide on a substrate and providing a first mask with a first opening exposing a first width and a pair of second widths towards opposite sides of the first width. Additionally, the method includes doping a first dopant of a first concentration through the first opening into a first thickness of the waveguide to form a first semiconducting phase thereof. The method includes providing a second mask with a second opening exposing part of the waveguide and doping a second dopant of a second concentration through the second opening into the part of the waveguide to form a second semiconductor phase thereof sharing a boundary with the first semiconducting phase to form a PN junction across the boundary. The boundary is allowed to vary with a margin of tolerance within the first width.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.