Method and apparatus for determining cleanliness of a sample
US9752975B2 · kind B2 · utility
2Cited by
6References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2016 |
| Grant date | Sep 5, 2017 |
| Priority date | — |
| Expiry date | Mar 27, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/1486
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Determining cleanliness of a sample by providing a continuous flow of clean air into a chamber through a HEPA filter, taking a reference reading of particle counts while the chamber is empty, introducing the sample into the chamber and taking a first reading of a particle count received from all sides of the sample in the chamber to determine loose particles in a particle size range of 0.1 microns up to 5 microns associated with the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.